報告摘要：Micro thermoelectric generators (TEG) have recently attracted great attention for applications such as monolithic on-chip thermal management of advanced high-performance chips and wireless power supply for the sensor network in the Internet of Things (IoT) society. Silicon is the most abundant and environmentally friendly semiconductor material. Benefit from the integration, scalability and low cost of complementary metal-oxide-semiconductor (CMOS) processing technology, various Si-based micro TEGs have been developed. In this talk, a planar cavity-free Si-nanowire micro TEG architecture fabricated by the CMOS processing technology will be introduced. The TEG utilizes a temperature gradient that is formed in the proximity of a perpendicular heat flow to the substrate. Thus, there is no need to etch away the substrate to form suspended Si-nanowires, which leads to a low fabrication cost and well-protected Si-nanowires. A high thermoelectric power density of 12 μW/cm2 under the harvesting mode is realized by applying a temperature difference of 5 K.
報告人簡介：2001.9－2005.7 北京航空航天大學 學士 2005.9－2008.1 北京航空航天大學 碩士 2008.4－2012.3 日本九州大學 博士 2012.4－2017.3 日本國家材料科學研究所 博士后 2017.4－現在 日本早稻田大學 副研究員 研究領域：微納尺度傳熱，熱電發電機，能量采集，芯片熱管理，應力發光傳感器